dc.contributor.author
Sontheimer, Tobias
dc.contributor.author
Preidel, Veit
dc.contributor.author
Lockau, Daniel
dc.contributor.author
Back, Franziska
dc.contributor.author
Rudigier-Voigt, Eveline
dc.contributor.author
Löchel, Bernd
dc.contributor.author
Erko, Alexei
dc.contributor.author
Schmidt, Frank
dc.contributor.author
Schnegg, Alexander
dc.contributor.author
Lips, Klaus
dc.contributor.author
Becker, Christiane
dc.contributor.author
Rech, Bernd
dc.date.accessioned
2018-06-08T04:09:04Z
dc.date.available
2014-04-04T07:27:49.305Z
dc.identifier.uri
https://refubium.fu-berlin.de/handle/fub188/16681
dc.identifier.uri
http://dx.doi.org/10.17169/refubium-20862
dc.description.abstract
By employing electron paramagnetic resonance spectroscopy, transmission
electron microscopy, and optical measurements, we systematically correlate the
structural and optical properties with the deep-level defect characteristics
of various tailored periodic Si microhole arrays, which are manufactured in an
easily scalable and versatile process on nanoimprinted sol-gel coated glass.
While tapered microhole arrays in a structured base layer are characterized by
partly nanocrystalline features, poor electronic quality with a defect
concentration of 1017 cm−3 and a high optical sub-band gap absorption, planar
polycrystalline Si layers perforated with periodic arrays of tapered
microholes are composed of a compact crystalline structure and a defect
concentration in the low 1016 cm−3 regime. The low defect concentration is
equivalent to the one in planar state-of-the-art solid phase crystallized Si
films and correlates with a low optical sub-band gap absorption. By
complementing the experimental characterization with 3-dimensional finite
element simulations, we provide the basis for a computer-aided approach for
the low-cost fabrication of novel high-quality structures on large areas
featuring tailored opto-electronic properties.
en
dc.rights.uri
http://publishing.aip.org/authors/web-posting-guidelines
dc.subject.ddc
500 Naturwissenschaften und Mathematik::530 Physik
dc.title
Correlation between structural and opto-electronic characteristics of
crystalline Si microhole arrays for photonic light management
dc.type
Wissenschaftlicher Artikel
dcterms.bibliographicCitation
Journal of Applied Physics. - 114 (2013), 17, Artikel Nr.173513/1-5
dc.identifier.sepid
34240
dcterms.bibliographicCitation.doi
10.1063/1.4829008
dcterms.bibliographicCitation.url
http://dx.doi.org/10.1063/1.4829008
refubium.affiliation
Physik
de
refubium.affiliation.other
Institut für Experimentalphysik
refubium.mycore.fudocsId
FUDOCS_document_000000020105
refubium.resourceType.isindependentpub
no
refubium.mycore.derivateId
FUDOCS_derivate_000000003397
dcterms.accessRights.openaire
open access
dcterms.isPartOf.issn
00218979