@article{Wolz2022,
author = {Wolz, Benedikt Christopher and Jaremenko, Christian and Vollnhals, Florian and Kling, Lasse and Wrege, Jan and Christiansen, Silke H.},
year = {2022},
language = {eng},
copyright = {https://creativecommons.org/licenses/by/4.0/},
title = {X‐ray microscopy and automatic detection of defects in through silicon vias in three‐dimensional integrated circuits},
volume = {144 (2022)},
issn = {2577-8196},
url = "http://dx.doi.org/10.17169/refubium-37664",
}